Advances in CMP/Polishing Technologies for the Manufacture by Doi, Toshiro; Marinescu, Ioan D.; Kurokawa, Syuhei(eds.)

By Doi, Toshiro; Marinescu, Ioan D.; Kurokawa, Syuhei(eds.)

CMP and sharpening are the main specific strategies used to complete the surfaces of mechanical and digital or semiconductor parts. This publication provides the newest advancements and technological concepts within the box, making state of the art R&D obtainable to the broader engineering neighborhood. many of the purposes of those techniques are saved as private as attainable (proprietary information), and particular info aren't visible in specialist or technical journals and magazines. This publication makes those approaches and functions available to a much broader business and educational viewers. construction at the basics of tribology, the technology of friction, put on and lubrication, the authors discover the sensible functions of CMP and sharpening throughout quite a few marketplace sectors. a result of excessive velocity of improvement of the electronics and semiconductors undefined, the various awarded tactics and functions come from those industries.

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Extra resources for Advances in CMP/Polishing Technologies for the Manufacture of Electronic Devices

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1 Sliding Velocity The sliding velocity on each point of a work piece is different. The MRR is dependent on, and sometimes proportional to, the sliding velocity of the work piece on a lap. Hence it is necessary to calculate this velocity. 20. 21 Sliding velocity on each point of work piece relative to the lap • Rotation of a lap. O is the center of the rotation and the speed of rotation is N rpm. • Revolution of a work holder around an axis of a lap. The speed of revolution is n rpm. • Rotation of the work holder around the axis of the holder itself.

The hardness of the work piece is greater than that of the lapping plate, and the hardness of the abrasive grains are greater than that of the work piece. Let us consider a single grain between the lapping plate and the work piece. When we apply a force to the work piece, a type of mutual hardness tester, as in a hardness test, is produced, with the grain as the indenter. The work piece and the lapping plate act as the test pieces. Due to the applied force, the grain penetrates to a certain depth in both the work piece and the lapping plate.

5. White fused alumina is used as the abrasive. 1 Sliding Velocity The sliding velocity on each point of a work piece is different. The MRR is dependent on, and sometimes proportional to, the sliding velocity of the work piece on a lap. Hence it is necessary to calculate this velocity. 20. 21 Sliding velocity on each point of work piece relative to the lap • Rotation of a lap. O is the center of the rotation and the speed of rotation is N rpm. • Revolution of a work holder around an axis of a lap.

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